Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854762 | MEMS sample holder, packaged product thereof, and apparatus of charged-particle beam such as electron microscope using the same | Xiaoming Chen, Daniel Tang, Liang-Fu Fan, Zhongwei Chen | 2023-12-26 |
| 11854763 | Backscattered electron detector, apparatus of charged-particle beam such as electron microscope comprising the same, and method thereof | Xiaoming Chen, Daniel Tang, Liang-Fu Fan, Zhongwei Chen | 2023-12-26 |
| 11664186 | Apparatus of electron beam comprising pinnacle limiting plate and method of reducing electron-electron interaction | Zhongwei Chen, Xiaoming Chen, Daniel Tang, Liang-Fu Fan | 2023-05-30 |