Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809086 | Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus | Raphael Nico Johan Stegen, Giovanni Luca Gattobigio | 2023-11-07 |
| 11774857 | Lithography apparatus and device manufacturing method | Erik Henricus Egidius Catharina Eummelen, Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Jorge Alberto Vieyra Salas +3 more | 2023-10-03 |
| 11720032 | Process tool and an inspection method | Raphael Nico Johan Stegen, Erik Henricus Egidius Catharina Eummelen, Christianus Wilhelmus Johannes Berendsen, Giovanni Luca Gattobigio | 2023-08-08 |
| 11614689 | Fluid handling structure and lithographic apparatus | Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more | 2023-03-28 |