Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774857 | Lithography apparatus and device manufacturing method | Frank Debougnoux, Koen Cuypers, Han Henricus Aldegonda Lempens, Theodorus Wilhelmus Polet, Jorge Alberto Vieyra Salas +3 more | 2023-10-03 |
| 11720032 | Process tool and an inspection method | Raphael Nico Johan Stegen, Christianus Wilhelmus Johannes Berendsen, Theodorus Wilhelmus Polet, Giovanni Luca Gattobigio | 2023-08-08 |
| 11614689 | Fluid handling structure and lithographic apparatus | Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu, Cornelius Maria Rops +4 more | 2023-03-28 |