Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809086 | Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus | Giovanni Luca Gattobigio, Theodorus Wilhelmus Polet | 2023-11-07 |
| 11720032 | Process tool and an inspection method | Erik Henricus Egidius Catharina Eummelen, Christianus Wilhelmus Johannes Berendsen, Theodorus Wilhelmus Polet, Giovanni Luca Gattobigio | 2023-08-08 |