Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803127 | Method for determining root cause affecting yield in a semiconductor manufacturing process | Chenxi Lin, Cyrus E. Tabery, Hakki Ergün Cekli, Boris Menchtchikov, Yi Zou +5 more | 2023-10-31 |
| 11754931 | Method for determining corrections for lithographic apparatus | Roy Werkman, David Deckers, Jeffrey Thomas Ziebarth, Samee Ur Rehman, Davit Harutyunyan +2 more | 2023-09-12 |
| 11714357 | Method to predict yield of a device manufacturing process | Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more | 2023-08-01 |