Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803127 | Method for determining root cause affecting yield in a semiconductor manufacturing process | Chenxi Lin, Cyrus E. Tabery, Hakki Ergün Cekli, Simon Philip Spencer Hastings, Boris Menchtchikov +5 more | 2023-10-31 |
| 11754931 | Method for determining corrections for lithographic apparatus | Roy Werkman, David Deckers, Simon Philip Spencer Hastings, Jeffrey Thomas Ziebarth, Samee Ur Rehman +2 more | 2023-09-12 |