Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749556 | Substrate holder for use in a lithographic apparatus | Niek Jacobus Johannes Roset, Marcus Martinus Petrus Adrianus Vermeulen, Simon Karel RAVENSBERGEN, Mark Constant Johannes Baggen, Roger Anton Marie Timmermans +1 more | 2023-09-05 |
| 11726411 | Substrate shape measuring device, substrate handling device, substrate shape measuring unit and method to handle substrates | Ringo Petrus Cornelis VAN DORST | 2023-08-15 |
| 11556064 | Stage apparatus and method for calibrating an object loading process | Theodorus Marcus Nagtegaal, Andre Schreuder, Anna Catharina Verkaik | 2023-01-17 |