Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726411 | Substrate shape measuring device, substrate handling device, substrate shape measuring unit and method to handle substrates | Gijs Kramer | 2023-08-15 |
| 11664264 | Lithographic apparatus, method for unloading a substrate and method for loading a substrate | Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Gerhard Albert TEN BRINKE, Dirk Jerome Andre SENDEN +11 more | 2023-05-30 |