Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664264 | Lithographic apparatus, method for unloading a substrate and method for loading a substrate | Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more | 2023-05-30 |
| 11556064 | Stage apparatus and method for calibrating an object loading process | Gijs Kramer, Theodorus Marcus Nagtegaal, Anna Catharina Verkaik | 2023-01-17 |