Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756188 | Determining a critical dimension variation of a pattern | Roman Kris, Ishai Schwarzband, Boaz Cohen, Evgeny Bal, Ariel Shkalim | 2023-09-12 |
| 11686571 | Local shape deviation in a semiconductor specimen | Roman Kris, Ilan BEN-HARUSH, Rafael BISTRITZER, Elad Sommer, Grigory Klebanov +5 more | 2023-06-27 |
| 11651509 | Method, system and computer program product for 3D-NAND CDSEM metrology | Roman Kris, Roi Meir, Sahar LEVIN, Ishai Schwarzband, Grigory Klebanov +6 more | 2023-05-16 |