Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11760771 | Ruthenium compound, raw material for forming thin film, and method for producing thin film | Masaki ENZU, Nana OKADA, Masako HATASE | 2023-09-19 |
| 11623935 | Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound | Atsushi Sakurai, Masako HATASE, Akihiro Nishida, Atsushi Yamashita | 2023-04-11 |
| 11618762 | Compound, raw material for forming thin film, method for manufacturing thin film, and amidine compound | Nana OKADA, Akihiro Nishida, Atsushi Yamashita | 2023-04-04 |
| 11555044 | Thin-film forming raw material for use in atomic layer deposition method, thin-film forming raw material, method for producing thin-film, and compound | Nana OKADA, Atsushi Yamashita | 2023-01-17 |