Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11760771 | Ruthenium compound, raw material for forming thin film, and method for producing thin film | Tomoharu Yoshino, Masaki ENZU, Nana OKADA | 2023-09-19 |
| 11623935 | Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound | Atsushi Sakurai, Tomoharu Yoshino, Akihiro Nishida, Atsushi Yamashita | 2023-04-11 |