Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11623935 | Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound | Atsushi Sakurai, Masako HATASE, Tomoharu Yoshino, Atsushi Yamashita | 2023-04-11 |
| 11618762 | Compound, raw material for forming thin film, method for manufacturing thin film, and amidine compound | Tomoharu Yoshino, Nana OKADA, Atsushi Yamashita | 2023-04-04 |