Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515190 | Thermal diffuser for a semiconductor wafer holder | Sanhong Zhang, Martin Wallinger, Blake Parkinson | 2022-11-29 |
| 11382180 | Multi-zone pedestal heater having a routing layer | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2022-07-05 |
| 11343879 | Multi-zone pedestal heater without vias | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2022-05-24 |
| 11304265 | Layered heater system having conductive overlays | Elias Russegger, Gerhard Schefbanker, Martin Wallinger | 2022-04-12 |