Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515190 | Thermal diffuser for a semiconductor wafer holder | Sanhong Zhang, Kevin Ptasienski, Blake Parkinson | 2022-11-29 |
| 11304264 | Temperature detection and control system for layered heaters | — | 2022-04-12 |
| 11304265 | Layered heater system having conductive overlays | Elias Russegger, Gerhard Schefbanker, Kevin Ptasienski | 2022-04-12 |
| 11240881 | Method of manufacturing and adjusting a resistive heater | Sanhong Zhang | 2022-02-01 |