Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11382180 | Multi-zone pedestal heater having a routing layer | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2022-07-05 |
| 11343879 | Multi-zone pedestal heater without vias | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2022-05-24 |