Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11448973 | Computational metrology based correction and control | Manouk RIJPSTRA, Cornelis Johannes Henricus LAMBREGTS, Wim Tjibbo Tel, Sarathi ROY, Cédric Désiré Grouwstra +3 more | 2022-09-20 |
| 11358168 | Coating apparatus | Shao-Wei Ma | 2022-06-14 |
| 11231533 | Optical element having dielectric layers formed by ion-assisted deposition and method for fabricating the same | Chih-Yu Chen, Chen-Yi Wu | 2022-01-25 |