Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538667 | Stage, plasma processing apparatus, and plasma processing method | Satoru Kawakami, Sumi Tanaka | 2022-12-27 |
| 11508556 | Plasma processing apparatus | Tomohito Komatsu, Jun NAKAGOMI, Kei Nagayosi | 2022-11-22 |
| 11476088 | Array antenna and plasma processing apparatus | Eiki KAMATA, Mikio Sato, Nobuhiko Yamamoto | 2022-10-18 |
| 11410835 | Plasma density monitor, plasma processing apparatus, and plasma processing method | Eiki KAMATA, Mikio Sato | 2022-08-09 |
| 11355326 | Plasma processing apparatus and control method | Mikio Sato, Eiki KAMATA | 2022-06-07 |
| 11244192 | Image judging system, image judging apparatus, and image judging method | — | 2022-02-08 |