Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538667 | Stage, plasma processing apparatus, and plasma processing method | Taro Ikeda, Satoru Kawakami | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538667 | Stage, plasma processing apparatus, and plasma processing method | Taro Ikeda, Satoru Kawakami | 2022-12-27 |