Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508556 | Plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Kei Nagayosi | 2022-11-22 |
| 11244810 | Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus | Kiyoshi Mori, Yuki Osada, Yoshiyuki Harima | 2022-02-08 |