Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244810 | Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus | Kiyoshi Mori, Yuki Osada, Jun NAKAGOMI | 2022-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11244810 | Electric field sensor, surface wave plasma source, and surface wave plasma processing apparatus | Kiyoshi Mori, Yuki Osada, Jun NAKAGOMI | 2022-02-08 |