Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476088 | Array antenna and plasma processing apparatus | Taro Ikeda, Mikio Sato, Nobuhiko Yamamoto | 2022-10-18 |
| 11410835 | Plasma density monitor, plasma processing apparatus, and plasma processing method | Taro Ikeda, Mikio Sato | 2022-08-09 |
| 11355326 | Plasma processing apparatus and control method | Taro Ikeda, Mikio Sato | 2022-06-07 |