Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404249 | Substrate processing apparatus | Shuichi Takahashi, Takaharu MIYADATE, Joji TAKAYOSHI, Rumiko MORIYA | 2022-08-02 |
| 11367590 | Plasma processing method and plasma processing apparatus | Kosuke Ogasawara, Kentaro Yamaguchi | 2022-06-21 |