Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404249 | Substrate processing apparatus | Takaharu MIYADATE, Takanori BANSE, Joji TAKAYOSHI, Rumiko MORIYA | 2022-08-02 |
| 11299165 | Evaluation device and evaluation method | — | 2022-04-12 |