Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404249 | Substrate processing apparatus | Shuichi Takahashi, Takanori BANSE, Joji TAKAYOSHI, Rumiko MORIYA | 2022-08-02 |
| 11264267 | Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage | Takashi Taira, Kenji Nagai, Hideaki Nagasaki | 2022-03-01 |