Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264267 | Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage | Takaharu MIYADATE, Takashi Taira, Kenji Nagai | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264267 | Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage | Takaharu MIYADATE, Takashi Taira, Kenji Nagai | 2022-03-01 |