Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404282 | Method of etching film and plasma processing apparatus | Takahisa Iwasaki, Kentaro Ishii, Seiji Ide, Chiju Hsieh | 2022-08-02 |
| 11367590 | Plasma processing method and plasma processing apparatus | Kentaro Yamaguchi, Takanori BANSE | 2022-06-21 |