Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404282 | Method of etching film and plasma processing apparatus | Kosuke Ogasawara, Takahisa Iwasaki, Kentaro Ishii, Chiju Hsieh | 2022-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404282 | Method of etching film and plasma processing apparatus | Kosuke Ogasawara, Takahisa Iwasaki, Kentaro Ishii, Chiju Hsieh | 2022-08-02 |