Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538691 | Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Aelan Mosden | 2022-12-27 |
| 11380554 | Gas phase etching system and method | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Aelan Mosden | 2022-07-05 |