Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538690 | Plasma etching techniques | Pingshan Luan | 2022-12-27 |
| 11538691 | Gas phase etch with controllable etch selectivity of Si-containing arc or silicon oxynitride to different films or masks | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Scott Lefevre | 2022-12-27 |
| 11482423 | Plasma etching techniques | Pingshan Luan | 2022-10-25 |
| 11424120 | Plasma etching techniques | Pingshan Luan, Christopher Catano | 2022-08-23 |
| 11380554 | Gas phase etching system and method | Subhadeep Kal, Nihar Mohanty, Angelique Raley, Scott Lefevre | 2022-07-05 |
| 11322350 | Non-plasma etch of titanium-containing material layers with tunable selectivity to alternate metals and dielectrics | Daisuke Ito, Subhadeep Kal, Shinji Irie | 2022-05-03 |