Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515153 | Film forming apparatus and film forming method | — | 2022-11-29 |
| 11508571 | Film forming method and film forming apparatus | Noriaki Fukiage | 2022-11-22 |
| 11473194 | Cleaning method of deposition apparatus | Hiroyuki Wada, Akihiro Kuribayashi, Takeshi Oyama | 2022-10-18 |
| 11414753 | Processing method | Hideomi HANE, Takeshi Oyama, Kentaro Oshimo, Yusuke Suzuki | 2022-08-16 |
| 11404271 | Film deposition apparatus for fine pattern forming | Kazuhide Hasebe, Shigeru Nakajima, Hiroki Murakami | 2022-08-02 |
| 11404272 | Film deposition apparatus for fine pattern forming | Kazuhide Hasebe, Shigeru Nakajima, Hiroki Murakami | 2022-08-02 |