Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473194 | Cleaning method of deposition apparatus | Jun Ogawa, Hiroyuki Wada, Takeshi Oyama | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473194 | Cleaning method of deposition apparatus | Jun Ogawa, Hiroyuki Wada, Takeshi Oyama | 2022-10-18 |