Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473194 | Cleaning method of deposition apparatus | Jun Ogawa, Hiroyuki Wada, Akihiro Kuribayashi | 2022-10-18 |
| 11414753 | Processing method | Hideomi HANE, Kentaro Oshimo, Yusuke Suzuki, Jun Ogawa | 2022-08-16 |