Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404271 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2022-08-02 |
| 11404272 | Film deposition apparatus for fine pattern forming | Shigeru Nakajima, Jun Ogawa, Hiroki Murakami | 2022-08-02 |