Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526073 | Pellicle and method of manufacturing same | Po Hsuan Li, Yu-Ting Lin, Huai-Tei Yang | 2022-12-13 |
| 11506971 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Pei-Cheng Hsu | 2022-11-22 |
| 11500282 | EUV photo masks and manufacturing method thereof | — | 2022-11-15 |
| 11454881 | Pellicle design for mask application | — | 2022-09-27 |
| 11402745 | Mask for EUV lithography and method of manufacturing the same | — | 2022-08-02 |
| 11360376 | Extreme ultraviolet mask and method for forming the same | — | 2022-06-14 |
| 11340525 | Pellicle and method of manufacturing same | Po Hsuan Li, Yu-Ting Lin, Huai-Tei Yang | 2022-05-24 |
| 11314169 | Robust, high transmission pellicle for extreme ultraviolet lithography systems | — | 2022-04-26 |
| 11294274 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2022-04-05 |