Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531262 | Mask blanks and methods for depositing layers on mask blank | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2022-12-20 |
| 11294271 | Mask for extreme ultraviolet photolithography | Hsin-Chang Lee, Ta-Cheng Lien | 2022-04-05 |