Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508562 | Low contamination chamber for surface activation | Ping-Yin Liu, Xin-Hua Huang, Lan-Lin Chao | 2022-11-22 |
| 11434129 | Semiconductor structure and method for fabricating the same | Chun-Wen Cheng, Yi-Chuan Teng, Cheng-Yu Hsieh, Shih-Chang Liu, Shih-Wei Lin | 2022-09-06 |
| 11261083 | Fence structure to prevent stiction in a MEMS motion sensor | Chang-Ming Wu | 2022-03-01 |
| 11239060 | Ion beam etching chamber with etching by-product redistributor | Te-Hsien Hsieh | 2022-02-01 |