Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488857 | Semiconductor device and method of manufacture using a contact etch stop layer (CESL) breakthrough process | Yu-Shih Wang, Po-Nan Yeh, U-Ting Chiu, Chun-Neng Lin, Chia-Cheng Chen +2 more | 2022-11-01 |
| 11476124 | Etchant for etching a cobalt-containing member in a semiconductor structure and method of etching a cobalt-containing member in a semiconductor structure | Ren-Kai Chen, Li-Chen Lee, Shun Wu Lin, Ming-Hsi Yeh | 2022-10-18 |
| 11424347 | Semiconductor device and method | Ssu-Yu Liao, Tsu-Hui Su, Chun-Hsiang Fan, Yu-Wen Wang, Ming-Hsi Yeh | 2022-08-23 |
| 11404552 | Fin Field-Effect Transistor and method of forming the same | Yu-Chi Pan, Ying-Liang Chuang, Ming-Hsi Yeh | 2022-08-02 |
| 11378882 | Chemical composition for tri-layer removal | Li-Min Chen, Neng-Jye Yang, Chia-Wei Wu, Jian-Jou Lian | 2022-07-05 |
| 11276571 | Method of breaking through etch stop layer | Yu-Shih Wang, Hong-Jie Yang, Chia-Ying Lee, Po-Nan Yeh, U-Ting Chiu +2 more | 2022-03-15 |