Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360384 | Method of fabricating and servicing a photomask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2022-06-14 |
| 11215918 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2022-01-04 |