Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11475201 | Inclusion of stochastic behavior in source mask optimization | William A. Stanton, Sylvain Berthiaume, Ulrich Klostermann | 2022-10-18 |
| 11468222 | Stochastic signal prediction in compact modeling | Yudhishthir Prasad Kandel | 2022-10-11 |
| 11402742 | Undercut EUV absorber reflective contrast enhancement | Yudhishthir Prasad Kandel | 2022-08-02 |
| 11314171 | Lithography improvement based on defect probability distributions and critical dimension variations | Yudhishthir Prasad Kandel, Qiliang Yan, Ulrich Klostermann | 2022-04-26 |