Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11475201 | Inclusion of stochastic behavior in source mask optimization | William A. Stanton, Sylvain Berthiaume, Lawrence S. Melvin, III | 2022-10-18 |
| 11314171 | Lithography improvement based on defect probability distributions and critical dimension variations | Lawrence S. Melvin, III, Yudhishthir Prasad Kandel, Qiliang Yan | 2022-04-26 |