Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314171 | Lithography improvement based on defect probability distributions and critical dimension variations | Lawrence S. Melvin, III, Yudhishthir Prasad Kandel, Ulrich Klostermann | 2022-04-26 |