Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11475201 | Inclusion of stochastic behavior in source mask optimization | Sylvain Berthiaume, Lawrence S. Melvin, III, Ulrich Klostermann | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11475201 | Inclusion of stochastic behavior in source mask optimization | Sylvain Berthiaume, Lawrence S. Melvin, III, Ulrich Klostermann | 2022-10-18 |