Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11471987 | Electrostatic chuck device and electrostatic chuck device manufacturing method | Keisuke Maeda, Masaki Ozaki, Masayuki Shiojiri, Takeshi Watanabe, Shinichi Maeta | 2022-10-18 |
| 11348819 | Electrostatic chuck device | Ryuuji Hayahara, Kazunori Ishimura, Hitoshi Kouno | 2022-05-31 |