Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11471987 | Electrostatic chuck device and electrostatic chuck device manufacturing method | Keisuke Maeda, Masayuki Shiojiri, Takeshi Watanabe, Shinichi Maeta, Yuuki Kinpara | 2022-10-18 |
| 11328948 | Electrostatic chuck device and method of manufacturing electrostatic chuck device | Norito MORISHITA | 2022-05-10 |