Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328948 | Electrostatic chuck device and method of manufacturing electrostatic chuck device | Masaki Ozaki | 2022-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11328948 | Electrostatic chuck device and method of manufacturing electrostatic chuck device | Masaki Ozaki | 2022-05-10 |