Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11471987 | Electrostatic chuck device and electrostatic chuck device manufacturing method | Keisuke Maeda, Masaki Ozaki, Takeshi Watanabe, Shinichi Maeta, Yuuki Kinpara | 2022-10-18 |