Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348819 | Electrostatic chuck device | Yuuki Kinpara, Ryuuji Hayahara, Hitoshi Kouno | 2022-05-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348819 | Electrostatic chuck device | Yuuki Kinpara, Ryuuji Hayahara, Hitoshi Kouno | 2022-05-31 |