Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532469 | Shielding device and thin-film-deposition equipment with the same | Jing-Cheng Lin | 2022-12-20 |
| 11527391 | Position-detectable shielding device and thin-film-deposition equipment with the same | Jing-Cheng Lin | 2022-12-13 |
| 11482403 | Thin-film-deposition equipment for detecting shielding mechanism | Jing-Cheng Lin | 2022-10-25 |
| 11476100 | Shielding mechanism and substrate-processing chamber with the same | Jing-Cheng Lin, Ta-Hao Kuo, Chi Hung Cheng | 2022-10-18 |
| 11476101 | Double-layer shielding device and thin-film-deposition equipment with the same | Jing-Cheng Lin | 2022-10-18 |