Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476100 | Shielding mechanism and substrate-processing chamber with the same | Jing-Cheng Lin, Yu-Te Shen, Chi Hung Cheng | 2022-10-18 |
| 11427910 | Atomic layer deposition equipment capable of reducing precursor deposition and atomic layer deposition process method using the same | Jing-Cheng Lin | 2022-08-30 |
| 11332826 | Atomic layer deposition equipment and process method | Jing-Cheng Lin | 2022-05-17 |